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A high temperature multibeam-optical-stress sensor (HTMOSS) was used to characterize the coefficient of thermal expansion (CTE) and yield stress of 1-micron thick Lipon films. 

Here we provide an in-depth structural characterization of the amorphous ionic glasses LiPON and LiSiPON with high Li content. Based on ab-initio molecular dynamics simulations, the structure of these materials is an inverted structure with either isolated polyanion tetrahedra or polyanion dimers suspended in a Li+ matrix. Based on neutron scattering data, this type of inverted structure leads to a significant amount of medium-range ordering in the structure, as demonstrated by two sharp diffraction peaks and a periodic structural oscillation in the density function G(r). On a local scale, adding N and Si increases the number of anion bridges and polyanion dimer structures, leading to higher ionic conductivity. In the medium range ordering, the addition of Si leads to more disorder in the polyanion substructure but a significant increase in the ordering of the O substructure. Finally, we demonstrate that this inverted structure with medium range ordering results in a glassy material that is both mechanically stiff and ductile on the nanoscale. 

Abstract The glassy solid electrolyte Lithium phosphorous oxynitride (LiPON) has been widely researched in thin film solid state battery format due to its outstanding stability when cycled against lithium. In addition, recent reports show thin film LiPON having interesting mechanical behaviors, especially its ability to resist micro‐scale cracking via densification and shear flow. In the present study, we have produced bulk LiPON glasses with varying nitrogen contents by ammonolysis of LiPO₃melts. The resulting compositions were determined to be LiPO_3‐3z/2N_z, where 0 ≤ z ≤ 0.75, and the z value of 0.75 is among the highest ever reported for this series of LiPON glasses. The short‐range order structures of the different resulting compositions were characterized by infrared, Raman,³¹P magic angle spinning nuclear magnetic resonance, and X‐ray photoelectron spectroscopies. Instrumented nano‐indentation was used to measure mechanical properties. It was observed that similar to previous studies, both trigonally coordinated (N_t) and doubly bonded (N_d) N co‐exist in the glasses in about the same amounts forz ≤ 0.36, the limit of N content in most previous studies. For glasses withz > 0.36, it was found that the fraction of the N_tincreased significantly while the fraction of N_dcorrespondingly decreased. The incorporation of nitrogen increased both the elastic modulus and hardness of the glass by approximately a factor of 1.5 when N/P ratio reaches 0.75. At the same time, an apparent embrittlement of the glass was observed due to nitridation, which was revealed by nanoindentation with an extra sharp nanoindenter tip.